Chromium nitride coatings were deposited using a hybrid physical vapor deposition (PVD) system containing a filter are deposition (FAD) and a metal plasma ion implantation source (MPII). Exactly how surface residual stress affects film characteristics is investigated using glancing incident X-ray diffraction (GIXRD) and pole figure analyses. Compared with unimplanted CrN, implanted carbon typically increases compressive residual stress and hardness. Wear resistance was also improved by implanted carbon. (C) 2007 Elsevier B.V. All rights reserved.