화학공학소재연구정보센터
Thin Solid Films, Vol.516, No.14, 4513-4518, 2008
Novel transparent conducting sol-gel oxide coatings
This work focuses on the preparation of novel ternary transparent conducting oxide coatings on glass by the sot-gel method. The coatings were deposited by spin-coating from solutions of appropriate metal precursors and heat-treated at different heat-treatment procedures. An increase in electrical conductivity was achieved by a final forming gas treatment. Best electrical and optical properties have been obtained for coatings of crystalline Zn2SnO4, Zn3In2O6 and Zn5In2O8 and X-ray amorphous ZnSnO3 with resistivities in the order of 10(-2)-10(-1) Omega cm, an average transmission in the visible of 85% and an average surface roughness of similar to 1 nm. ZnGa2O4 and GaSbO4 coatings showed no electrical conductivity. For Zn2SnO4 coatings, a restricted crystallite growth was observed probably due to phase segregation effects. Electrical properties of coatings in the system ZnO-In2O3 were interpreted on the basis of the percolation theory. (C) 2007 Elsevier B.V. All rights reserved.