Super-hydrophilic porous titania thin films containing mesoscale channels were successfully synthesized by the carbonatation reaction. An amorphous Li-Ti-O film with a smooth surface was prepared on a glass substrate by radio frequency magnetron sputtering using a Li2TiO3 target in an Ar atmosphere. The as-deposited films were carbonated at 400 degrees C for 10 h in CO2, resulting in the formation of Li2CO3 and the development of characteristic through-channels. After dissolution of the Li2CO3 in distilled water, porous TiO2 thin films with mesoscale through-channels were fabricated. The obtained porous films had a large surface area and show a rapid decrease in the water contact angle or excellent superhydrophilicity. (c) 2007 Elsevier B.V. All rights reserved.