Highly ordered and vertically oriented TiO2 nanotube arrays with a length of 250 nm and a diameter of 70 nm were prepared by atomic layer deposition (AID) coupled with anodic aluminum oxide (AAO) template. An ordered heterojunction (OHJ) polymer/inorganic hybrid solar cell was fabricated by successful infiltration of P3HT into the nanotube arrays. Structural features of the nanotube arrays enabling the interdigitated structure of the OHJ were discussed and the performance of the solar cell was characterized to be the power conversion efficiency of 0.50%. (C) 2011 Elsevier B.V. All rights reserved.