We have proposed a novel laser-assisted-deposition (LAD) process for improving the crystalline quality of CIGS thin films and cell performance. The influences of laser power, Ga content in CIGS, substrate temperature, and photon energy of laser on CIGS thin films and solar cells have been investigated. In the LAD process a pulsed excimer laser and a pulsed Nd:YAG laser were irradiated onto the substrate surface during CIGS deposition by the three-stage process. The crystalline quality of CIGS thin films and cell performance, particularly open-circuit-voltage, improved by LAD process for all ranges of Ga content and at substrate temperature ranges of 400-550 degrees C. It was also found that the laser irradiation enhanced the diffusion of Ga into CIGS even at low substrate temperatures, which strongly affects the formation of double-graded bandgap. The PL decay time of LAD-GIGS solar cells was much longer than that of the fabricated by the three-stage process, which implies the reduced defects in CIGS absorber layer. The improved thin-film quality and cell performance became noticeable only when the laser wavelength was shorter than 266 nm (4.66 eV of photon energy). This result strongly suggests that the impacts of pulsed-laser irradiation are dominated by photon-energy rather than thermal-energy. (C) 2010 Elsevier B.V. All rights reserved.