Hydrogenated silicon thin films were prepared at different electrode separations and total gas flow rates. Nanocrystalline Si:H films with similar crystalline volume fraction deposited at lower electrode separation have lower microstructural factor. Quality of the absorber layer and solar cell performance improve as electrode separation and deposition power density simultaneously decrease. Maximum efficiency of 6.9% is obtained for solar cell with absorber layer deposited at an electrode separation of 1 cm. (C) 2010 Elsevier B.V. All rights reserved.