A novel process, different in all steps from the common process usually used to fabricate CdTe/CdS thin-film solar cells, is described. This process on the one hand permits one to obtain high-quality layers and high-quality cells and on the other hand is particularly suitable to be scaled up at an industrial level. In fact, neither etching baths nor CdCl(2) deposition is used in this process. The back contact is made with a buffer layer capable of stabilizing Cu and, as a consequence, the devices are very stable. (C) 2009 Elsevier B.V. All rights reserved.