A new etching method for texturing multicrystalline p-type Si wafers for solar cells was developed. In this method, we used platinum or silver particles as the catalysts, which were loaded on the wafers by means of the electroless-plating technique. After deposition of the catalysts, the wafers were etched and textured in HF solution, to which in some cases chemical oxidants were added. The solar cells (4 cm(2)) manufactured from the textured wafers showed efficiency as high as 16.6%, which was about 1% (absolute) higher than that of the cells made from the wafers treated by the conventional alkaline method. (C) 2005 Elsevier B.V. All rights reserved.