Cu(In,Ga)Se-2 (CIGS) surface was modified with Zn doping using vacuum evaporation. Substrate temperatures and exposure times during the Zn evaporation were changed to control a distribution of Zn in the CIGS films. Diffusion of Zn in the CIGS films was observed at the substrate temperature of over 200degreesC. The diffusion depth of Zn increases with increasing the exposure time at the substrate temperature of 300degreesC. Solar cells were fabricated using the Zn doped CIGS films. A distribution of the efficiencies decreases with increasing the exposure time of Zn vapor. The doping of Zn at the film surface improved reproducibility of a high fill factor and efficiency. A solar cell fabricated using the CIGS film modified with Zn doping showed an efficiency of 14.8%. (C) 2002 Elsevier Science B.V. All rights reserved.