An initial efficiency of 14.1% (J(sc) = 13.6 mA/cm(2), V-oc = 1.392 V, FF = 74.3%) has been achieved for a-Si/transparent interlayer/poly Si solar cell (total area of 1 cm 2). Both a-Si and crystalline Si films were fabricated by plasma chemical deposition at low temperature. The short circuit current was enhanced by the introduction of a transparent intermediate layer. An initial aperture efficiency of 11.7% has been achieved for 910 x 455 mm(2) a-Si/poly Si integrated solar cell submodule, where the laser-scribing techniques were applied for series interconnections. The results of our first run of 266 submodules in our pilot plant showed the average efficiency of 11.2%, which is applicable for mass production. (C) 2002 Elsevier Science B.V. All rights reserved.