The CuInS2 films with a maximum thickness of about 9 mum and a maximum atomic Cu/In ratio (as-deposited precursor) of 3.0 were prepared, and, to prevent peeling from substrate, were heat treated during Cu/In evaporation and/or intercalated with very thin Pt or I'd (between Mo and CuInS2 layers). Thus, we could prepare the films with very large grain. It is also worth noting that the large grain films were easily optimized by chemical etching of the films using a thick film and Cu-rich composition. Therefore, the absorber for high-efficiency solar cells can be prepared by varying over a wide range of composition and thickness of precursor. The characterization of CuInS2 absorbers with various film thickness and compositions were investigated and related with the performance of the photovoltaic device.