In this study, the formation of by-products resulting from the decomposition of trichloroethylene with a negative DC glow discharge has been investigated. By combining the qualitative data from mass spectrometry and Fourier-transform infrared spectroscopy, the formation of phosgene, dichloroacetylchloride and trichloroacetaldehyde have been confirmed as incomplete oxidation products. Hydrogen chloride, chlorine, carbon monoxide and carbon dioxide were also detected. Also, formation of ozone was found in the outlet stream. Based on this information, it is possible to chose an appropriate catalyst to combine with non thermal plasma. In this way emission of harmful, incomplete oxidation products can be further reduced at a lower energy cost.