화학공학소재연구정보센터
Plasma Chemistry and Plasma Processing, Vol.31, No.1, 205-215, 2011
Interaction Mechanisms Between Ar-O-2 Post-Discharge and Stearic Acid II: Behaviour of Thick Films
We study the interaction of thick films (similar to 4 mm) of stearic acid (SA), a C-18 alkane skeleton with an acid function, with late Ar-O-2 post-discharge. Contrary to what is observed with thin films of SA (similar to 2-3 mu m) which are efficiently etched (part I), only functionalization is observed over the first 2 h of treatment with a plasma source operated in the continuous mode, whatever the temperature. The heat released by surface reactions affects non-linearly the temperature of the substrate. Pulsing the source at a frequency ranging from 0.1 to 1 kHz slows down the functionalization process but does not allow any etching of the material. On the contrary, the SA can be etched as thick films by pulsing the oxygen flow rate at a frequency below 50 mHz. By pulsing the reactive gas, the time averaged value of the [O]/[O-2] ratio is decreased, limiting the functionalization processes due to oxygen atoms, and the mean temperature is lowered, decreasing the diffusion length of O-2 (and/or possibly O-2*) species in the SA which are responsible for the scission of C-C bonds of radicals.