화학공학소재연구정보센터
Plasma Chemistry and Plasma Processing, Vol.24, No.4, 493-510, 2004
Development of novel coating technology by vacuum arc with rotating cathodes for industrial production of nc-(Al1-xTix)N/a-Si3N4 superhard nanocomposite coatings for dry, hard machining
The development of novel superhard nanocomposite, nano-layered coatings and of the coating technology based on vacuum arc evaporation from rotating electrodes is summarized. The nc-(Al1-xTix)Nla-Si3N4 coatings in which the nanocrystals of the Al-rich solid solution with the fcc crystal structure of TiN are imbedded into a thin matrix of amorphous silicon nitride show high thermal stability, oxidation resistance and excellent performance in dry, fast machining that is superior to the state-of-the-art (Ti1-xAlx)N coatings.