Barium Ferrite (BaFe12O19) films have been successfully deposited on high silica glass substrates using an inductively coupled plasma source. Precursor of the metals used was a barium acetate and ferric nitrate solution of controlled concentration which was injected into the hot region of the plasma using a nebulizer. Variables studied included molar ratio of precursor liquid, substrate to plasma distance, plasma torch power, and oxygen concentration in plasma and carrier gas. Films were characterized for microstructure, composition and magnetic properties using scanning and transmission electron microscopy with energy dispersive spectroscopy, X-ray diffraction, and vibrating sample magnetrometry. Results indicate that barium ferrite forms under certain conditions of oxygen content in the plasma and substrate temperature above 800degreesC. Magnetic properties indicate that there is some degree of preferred orientation of the barium ferrite crystals on the substrate, and coercivity and magnetization correspond to that of a hard magnetic material.