화학공학소재연구정보센터
Plasma Chemistry and Plasma Processing, Vol.21, No.3, 371-400, 2001
Transient response of radio frequency inductively coupled plasma for pulse modulation
Properties of an argon/hydrogen (89% molar argon) radio frequency inductively coupled plasma subject to a periodic power (or coil current) profile is investigated both numerically and experimentally The model is based on a time-dependent, two-dimensional (2-D), axisymmetric model of the radio frequency (rf) inductively coupled plasma (ICP) under local thermodynamic equilibrium (LTE). The governing time-dependent equations for the conservation of mass, momentum, and energy, along with Maxwell's equations are solved numerically. The ICP is operated at 1 MHz induction frequency with 55 slpm total gas-flow rate. Spectroscopic measurements of argon line intensities are also made for a similar plasma setup and predictions are compared with the measured ArI line intensity at 751 nm. We found that the plasma responds quickly to a change in the power (ol coil current). Two important parameters responsible for plasma heating (Joule healing term) and for its constriction (Lorentz force) follow the temporal behavior of the coil current. The response of the theoretically predicted atomic argon line intensity at 751 nm is slower compared to the experimental observations. This is thought to be due to the fast response of the electron gas to a change in the electromagnetic fields, which is not represented in an LTE model.