An efficient method for the preparation of N-F-codoped visible light active TiO2 nanorod arrays is reported. In the process, simultaneous nitrogen and fluorine doped TiO2 nanorod arrays on the glass substrates were achieved by liquid phase deposition method using ZnO nanorod arrays as templates with different calcination temperature. The as-prepared samples were characterized by Raman spectroscopy, scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray photoelectron spectroscopy (XPS) and UV-vis absorption spectra measurements. It was found that calcination temperature is an important factor influencing the microstructure and the amount of N and F in TiO2 nanorod arrays samples. The visible light photocatalytic properties were investigated using methylene blue (MB) dye as a model system. The results showed that N-F-codoped TiO2 nanorod arrays sample calcined at 450 degrees C demonstrated the best visible light activity in all samples, much higher than that of TiO2 nanoparticles and P25 particles films. (C) 2010 Elsevier Ltd. All rights reserved.