Aerosol pyrolysis (AP) was used to prepare thin films of titanium dioxide on various substrates. The films were characterized by SEM, SIMS, XRD, and thickness measurements, and by photoelectrochemical response before and after annealing in various ambients. Pinhole-free anatase films of thickness up to 1000 nm were prepared. Incident photon to current efficiencies (IPCEs) of up to 20% at 365 nm were obtained for thick films under depiction conditions, in aqueous electrolytes. (C) 2004 Elsevier Ltd. All rights reserved.