La0.67Sr0.33MnO3-delta films, fabricated on (111) LaAlO3 single-crystal substrates using a direct current magnetron sputtering technique, are demonstrated by X-ray diffraction patterns and pole figures to be high quality epitaxial films and there is a perfect matching relationship between the films and the substrates. We observed an obvious difference of the electronic-magnetic transportation properties among films sputtered on (111), (100) and (110) LaAlO3 substrates, respectively. A mechanism for the difference is discussed briefly. (C) 2003 Elsevier Science Ltd. All rights reserved.