KAGAKU KOGAKU RONBUNSHU, Vol.27, No.2, 282-284, 2001
Transparent conductive ZnO thin films prepared by plasma-enhanced CVD: Effect of aluminum dopant
Zinc oxide is a promising material for the transparent electrodes and ultra violet lasers. Zinc oxide thin films were prepared by plasma-enhanced CVD. Minimum resistivity of 9.7x10(-4) Ohm .cm was obtained at substrate temperature of 400 degreesC. The ZnO film having large grain size showed high mobility and low resistivity.