In this work, we have prepared copper-doped multicomponent tellurite glasses by solid state electric field-assisted diffusion. The concentration profiles of the elements have been measured by the secondary ion mass spectrometry. The depth profile of copper can be well fitted only by a modified erfc-like solution of the second Fick's law which assumes that both the Cu(+) and Cu(2+) ions are involved in the diffusion. The modeling shows that the Cu(2+) ions are much more mobile than the Cu(+) ones in the tellurite glasses and affected strongly by the applied electric field. Our results demonstrate the possibility of fabricating copper-doped planar waveguides based on the tellurite glasses.