The influence of different surface treatments on the physical and chemical surface properties of poly(etheretherketone) (PEEK), poly(phenylenesulfide) (PPS) and a liquid crystal polymer (LCP) was studied. For all the three polymers, the adhesion strength of an adhesively-bonded copper foil could be increased significantly by a chemical etching process using chromic sulphuric acid or a low pressure air-plasma treatment. However, for LCP the enhancement of adhesion by the surface treatments was lower than for the other polymers. Peel tests were employed for determining the adhesion strength of the copper foil. The physical surface properties were investigated by laser scanning microscopy (LSM). Contact-angle measurements and X-ray photoelectron spectroscopy (XPS) provided detailed information on the chemical surface properties. The detailed XPS analyses revealed different chemical mechanisms of the surface treatments depending on the polymer investigated. In all cases an incorporation of oxygen containing groups by the surface treatments was found to be responsible for a better adhesion of the copper foil on the treated polymer films compared to the untreated.