The results of an X-ray photoelectron spectroscopic investigation of the oxidation of surface layers of low-density polyethylene (LDPE) and biaxially oriented polypropylene (BOPP) films are presented. The analysis was performed using different take-off angles? namely 10 degrees, 30 degrees, and 90 degrees; thus, the depths of the examined layers were 0.6, 1.9, and 3.7 nm, respectively. It was found that the course of the oxidation process in the surface layers was similar for both polymer films. However, for treatment energies lower than 5 kJ/m(2), the extent of the oxidation was higher for the LDPE film, whereas for energies above this value, the BOPP film was more oxidized. As detected by X-ray photoelectron spectroscopy (XPS), desorption of oxygen from the film surface occurs for both polymers during the treatment.