화학공학소재연구정보센터

Plasma Chemistry and Plasma Processing

Plasma Chemistry and Plasma Processing, Vol.17, No.2 Entire volume, number list
ISSN: 0272-4324 (Print) 

In this Issue (9 articles)

107 - 121 Reactions of Hydrocarbons in a Supersonic Vacuum Plasma-Jet
Pauser H, Schwarzler CG, Laimer J, Stori H
123 - 154 DC Plasma Polymerization of Hexamethyldisiloxane
Vanooij WJ, Eufinger S, Guo SY
155 - 167 Plasma-Etching of III-V Semiconductors in BCl3 Chemistries .1. GaAs and Related-Compounds
Lee JW, Hong J, Lambers ES, Abernathy CR, Pearton SJ, Hobson WS, Ren F
169 - 179 Plasma-Etching of III-V Semiconductors in BCl3 Chemistries .2. InP and Related-Compounds
Lee JW, Hong J, Lambers ES, Abernathy CR, Pearton SJ, Hobson WS, Ren F
181 - 192 Optical-Emission Spectroscopy as a Real-Time Diagnostic-Tool for Plasma-Assisted Deposition of Tin
Boumerzoug M, Boudreau M, Mascher P
193 - 206 Characterization of an Argon-Hydrogen Microwave-Discharge Used as an Atomic-Hydrogen Source - Effect of Hydrogen Dilution on the Atomic-Hydrogen Production
Thomas L, Jauberteau JL, Jauberteau I, Aubreton J, Catherinot A
207 - 217 Comparison Between Gibbs Free-Energy Minimization and Mass-Action Law for a Multitemperature Plasma with Application to Nitrogen
Andre P, Abbaoui M, Bessege R, Lefort A
219 - 249 Effects of Process Parameters on Ultrafine SiC Synthesis Using Induction Plasmas
Guo JY, Gitzhofer F, Boulos MI
251 - 262 Impact of Copper-Vapor Contamination on Argon Arcs
Akbar S, Etemadi K