검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Development of a large-area, multi-helicon rectangular plasma source for TFT-LCD processing Kim YJ, Han SH, Hwang W, Hwang YS Thin Solid Films, 435(1-2), 270, 2003 |
| No. | Article |
|---|---|
| 1 |
Development of a large-area, multi-helicon rectangular plasma source for TFT-LCD processing Kim YJ, Han SH, Hwang W, Hwang YS Thin Solid Films, 435(1-2), 270, 2003 |