검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Reversing the hydrogen silsesquioxane image by silicon nitride and silicon oxide chemical mechanical polishing van Delft FCMJM, van der Kruis FJH, van Eerd PPJ, van Esch HA, van de Laar HWJJ Journal of Vacuum Science & Technology B, 24(6), 3125, 2006 |