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| No. | Article |
|---|---|
| 1 |
Material and process studies in the integration of plasma-promoted chemical-vapor deposition of aluminum with benzocyclobutene low-dielectric constant polymer Talevi R, Gundlach H, Bian ZL, Knorr A, van Gestel M, Padiyar S, Kaloyeros AE, Geer RE, Shaffer EO, Martin S Journal of Vacuum Science & Technology B, 18(1), 252, 2000 |