검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Reversing the hydrogen silsesquioxane image by silicon nitride and silicon oxide chemical mechanical polishing van Delft FCMJM, van der Kruis FJH, van Eerd PPJ, van Esch HA, van de Laar HWJJ Journal of Vacuum Science & Technology B, 24(6), 3125, 2006 |
| 2 |
Method for manufacturing nanoscale structures in transition metal layers van Delft FCMJM, Ketelaars WSMM, Kroon M, Lambregts J Journal of Vacuum Science & Technology B, 20(6), 2763, 2002 |
| 3 |
Delay-time and aging effects on contrast and sensitivity of hydrogen silsesquioxane van Delft FCMJM Journal of Vacuum Science & Technology B, 20(6), 2932, 2002 |
| 4 |
Hydrogen silsesquioxane/novolak bilayer resist for high aspect ratio nanoscale electron-beam lithography van Delft FCMJM, Weterings JP, van Langen-Suurling AK, Romijn H Journal of Vacuum Science & Technology B, 18(6), 3419, 2000 |