화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Al-doped ZnO (AZO) films deposited by reactive sputtering with unipolar-pulsing and plasma-emission control systems
Hirohata K, Nishi Y, Tsukamoto N, Oka N, Sato Y, Yamamoto I, Shigesato Y
Thin Solid Films, 518(11), 2980, 2010
2 Photocatalytic TiO2 films deposited by reactive magnetron sputtering with unipolar pulsing and plasma emission control systems
Ohno S, Takasawa N, Sato Y, Yoshikawa M, Suzuki K, Frach P, Shigesato Y
Thin Solid Films, 496(1), 126, 2006