검색결과 : 1건
No. | Article |
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1 |
Influence of single-source precursors on PACVD-derived boron carbonitride thin films Hegemann D, Riedel R, Oehr C Thin Solid Films, 339(1-2), 154, 1999 |
No. | Article |
---|---|
1 |
Influence of single-source precursors on PACVD-derived boron carbonitride thin films Hegemann D, Riedel R, Oehr C Thin Solid Films, 339(1-2), 154, 1999 |