검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Mechanical stress in ALD-Al2O3 films Krautheim G, Hecht T, Jakschik S, Schroder U, Zahn W Applied Surface Science, 252(1), 200, 2005 |
| No. | Article |
|---|---|
| 1 |
Mechanical stress in ALD-Al2O3 films Krautheim G, Hecht T, Jakschik S, Schroder U, Zahn W Applied Surface Science, 252(1), 200, 2005 |