검색결과 : 2건
No. | Article |
---|---|
1 |
Effects of target bias voltage on indium tin oxide films deposited by high target utilisation sputtering Calnan S, Upadhyaya HM, Dann SE, Thwaites MJ, Tiwari AN Thin Solid Films, 515(24), 8500, 2007 |
2 |
Study on change in SIMS intensities near the interface between silicon-nitride film and silicon substrate Hasegawa T, Date T, Karen A, Masuda A Applied Surface Science, 231-2, 725, 2004 |