화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Surface morphology and growth mechanisms for sputtered amorphous silicon nitride thin films
Yu LH, Xu JH, Dong SR, Kojima I
Thin Solid Films, 516(8), 1781, 2008
2 Surface activation of thin silicon oxides by wet cleaning and silanization
Han Y, Mayer D, Offenhausser A, Ingebrandt S
Thin Solid Films, 510(1-2), 175, 2006
3 Microstructure and residual stress in gamma-LiAlO2 layer fabricated by vapor transport equilibration on (11(2)over-bar0) sapphire
Wang YZ, Yang WQ, Li SZ, Peng GL, Liu SL, Zou J, Zhou SM, Xu J, Zhang R
Journal of Crystal Growth, 270(1-2), 128, 2004