화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Flattening of low temperature epitaxial Ge1-xSnx/Ge/Si(100) alloys via mass transport during post-growth annealing
Wang W, Su SJ, Zheng J, Zhang GZ, Xue CL, Zuo YH, Cheng BW, Wang QM
Applied Surface Science, 257(9), 4468, 2011
2 Quantitative description of surface morphology evolution in a growing film
Trofimov VI, Park HS
Applied Surface Science, 219(1-2), 93, 2003
3 Epitaxy of Si/Si1-xGex heterostructures with very small roughness using a production-compatible ultrahigh vacuum chemical vapor deposition reactor
Lafontaine H, Mason BF, Rolfe SJ, Perovic DD, Bahierathan B
Journal of Vacuum Science & Technology B, 16(2), 599, 1998