화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Influence of deposition conditions on the composition, texture and microstructure of RF-magnetron sputter-deposited hydroxyapatite thin films
Ivanova AA, Surmeneva MA, Surmenev RA, Depla D
Thin Solid Films, 591, 368, 2015
2 Highly uniform epitaxial SiC-layers grown in a hot-wall CVD reactor with mechanical rotation
Schoner A, Konstantinov A, Karlsson S, Berge R
Materials Science Forum, 389-3, 187, 2002
3 Model of boron incorporation into silicon epitaxial film in a B2H6-SiHCl3-H-2 system
Habuka H, Otsuka T, Qu WF, Shimada M, Okuyama K
Journal of Crystal Growth, 222(1-2), 183, 2001