검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
The Influence of Ta underlayers on the structure of TiO2 thin films deposited on an unheated glass substrate Kamiko M, Aotani K, Suenaga R, Koo JW, Nose K, Kyuno K, Ha JG Applied Surface Science, 258(22), 8764, 2012 |
| 2 |
Model parameter estimation and feedback control of surface roughness in a sputtering process Hu GS, Lou YM, Christofides PD Chemical Engineering Science, 63(7), 1800, 2008 |
| 3 |
Feedback control of surface roughness in sputtering processes using the stochastic Kuramoto-Sivashinsky equation Lou YM, Christofides PD Computers & Chemical Engineering, 29(4), 741, 2005 |