화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Three dimensional imaging using secondary ion mass spectrometry and atomic force microscopy
Fleming Y, Wirtz T, Gysin U, Glatzel T, Wegmann U, Meyer E, Maier U, Rychen J
Applied Surface Science, 258(4), 1322, 2011
2 Range evaluation in SIMS depth profiles of Er-implantations in silicon
Mayerhofer K, Foisner H, Piplits K, Hobler G, Palmetshofer L, Hutter H
Applied Surface Science, 252(1), 271, 2005
3 On the reliability of SIMS depth profiles through HfO2-stacks
Vandervorst W, Bennett J, Huyghebaert C, Conard T, Gondran C, De Witte H
Applied Surface Science, 231-2, 569, 2004
4 Transient effects induced through ripple topography growth during Cs+ depth profile analysis of Si at high incidence angles
van der Heide PAW, Lima MS, Perry SS, Bennett J
Applied Surface Science, 203, 156, 2003