화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Quantitative SIMS measurement of high concentration of boron in silicon (up to 20 at.%) using an isotopic comparative method
Dubois C, Prudon G, Gautier B, Dupuy JC
Applied Surface Science, 255(4), 1377, 2008
2 Quantitative depth profiling at silicon/silicon oxide interfaces by means of Cs+ sputtering in negative mode by ToF-SIMS: a full spectrum approach
Ferrari S, Perego A, Fanciulli A
Applied Surface Science, 203, 52, 2003