화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 SOI technology characterization using SOI-MOS capacitor
Sonnenberg V, Martino JA
Solid-State Electronics, 49(1), 109, 2005
2 Simultaneous extraction of the silicon film and front oxide thicknesses on fully depleted SOI nMOSFETs
Nicolett AS, Martino JA, Simoen E, Claeys C
Solid-State Electronics, 44(11), 1961, 2000
3 Ellipsometric analysis of polysilicon layers
Gruska B
Thin Solid Films, 364(1-2), 138, 2000