화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Six months repeatability of D-SIMS depth profile using an ultra-low-energy probe
Li ZP, Hoshi T, Oiwa R
Applied Surface Science, 203, 318, 2003
2 Characteristics of ultra-low-energy Cs+ ion beam bombardments
Li ZP, Hoshi T, Oiwa R
Applied Surface Science, 203, 323, 2003
3 SIMS backside depth profiling of ultra shallow implants
Yeo KL, Wee ATS, See A, Liu R, Ng CM
Applied Surface Science, 203, 335, 2003
4 Comparison between Xe+ and O-2(+) primary ions, at low impact energy, on B delta-doping, SiGe-Si superlattice and Al/Ti multilayer structures
Laugier F, Holliger P, Dupuy JC, Baboux N
Applied Surface Science, 203, 348, 2003
5 LEXES and SIMS as complementary techniques for full quantitative characterization of nanometer structures
Hombourger C, Staub R, Schuhmacher M, Desse F, de Chambost E, Hitzman C
Applied Surface Science, 203, 383, 2003