검색결과 : 11건
| No. | Article |
|---|---|
| 1 |
Kinetic Monte Carlo simulation for semiconductor processing: A review Martin-Bragado I, Borges R, Balbuena JP, Jaraiz M PROGRESS IN MATERIALS SCIENCE, 92, 1, 2018 |
| 2 |
Real time feedback control of plasma density using a floating probe in semiconductor processing Jang SH, Oh SJ, Lee YK, Chung CW Current Applied Physics, 13(1), 76, 2013 |
| 3 |
Germanium vertical Tunneling Field-Effect Transistor Hahnel D, Oehme M, Sarlija M, Karmous A, Schmid M, Werner J, Kirfel O, Fischer I, Schulze J Solid-State Electronics, 62(1), 132, 2011 |
| 4 |
Effect of temperature on the decomposition of trifluoromethane in a dielectric barrier discharge reactor Kim DH, Mok YS, Lee SB Thin Solid Films, 519(20), 6960, 2011 |
| 5 |
Simulation-based design and experimental evaluation of a spatially controllable CVD reactor Choo JO, Adomaitis RA, Rubloff GW, Henn-Lecordier L, Liu YJ AIChE Journal, 51(2), 572, 2005 |
| 6 |
In-line phase and texture control in microelectronics industry Kozaczek K Materials Science Forum, 495-497, 1343, 2005 |
| 7 |
Preparation of Cr-Si multilayer structures for thin film heater applications Cho NI, Kim MC Thin Solid Films, 475(1-2), 235, 2005 |
| 8 |
Optimal control of rapid thermal annealing in a semiconductor process Gunawan R, Jung MYL, Seebauer EG, Braatz RD Journal of Process Control, 14(4), 423, 2004 |
| 9 |
Numerical modeling of silicon oxide particle formation and transport in a one-dimensional low-pressure chemical vapor deposition reactor Suh SM, Zachariah MR, Girshick SL Journal of Aerosol Science, 33(6), 943, 2002 |
| 10 |
Simulation of the adhesion of particles to surfaces Cooper K, Gupta A, Beaudoin S Journal of Colloid and Interface Science, 234(2), 284, 2001 |