검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Flexible thin-film transistors on planarized parylene substrate with recessed individual backgates Farkas B, Nyberg T, Nanai L Solid-State Electronics, 94, 11, 2014 |
| 2 |
Feedback control of plasma electron density and ion energy in an inductively coupled plasma etcher Lin C, Leou KC, Huang HM, Hsieh CH Journal of Vacuum Science & Technology A, 27(1), 157, 2009 |
| 3 |
Computational performance bounds for Markov chains with applications Morrison JR, Kumar PR IEEE Transactions on Automatic Control, 53(5), 1306, 2008 |
| 4 |
Image quality improvement in focused ion beam photomask repair system Yasaka A, Aramaki F, Muramatsu M, Kozakai T, Matsuda O, Sugiyama Y, Doi T, Takaoka O, Hagiwara R, Nakamae K Journal of Vacuum Science & Technology B, 26(6), 2121, 2008 |
| 5 |
Aberration correction for electron beam inspection, metrology, and lithography Munro E, Rouse J, Liu HN, Wang LP Journal of Vacuum Science & Technology B, 26(6), 2331, 2008 |