검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Non-chemically amplified resists containing polyhedral oligomeric silsesquioxane for a bilayer resist system Woo SA, Choi SY, Kim JB Polymer, 98, 336, 2016 |
| 2 |
Micro pattern formation of ceramic thin films by synthesis from aqueous solution using resist pattern as a mold Ozawa N, Yao T Solid State Ionics, 151(1-4), 79, 2002 |
| 3 |
Applications of molecular modeling in nanolithography Pawloski AR, Torres JA, Nealey PF, de Pablo JJ Journal of Vacuum Science & Technology B, 17(6), 3371, 1999 |