검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Substrate biasing effects on the microstructure of magnetron-sputtered AlN films investigated by in situ reflectance interferometry Pigeat P, Easwarakhanthan T Thin Solid Films, 516(12), 3957, 2008 |
| No. | Article |
|---|---|
| 1 |
Substrate biasing effects on the microstructure of magnetron-sputtered AlN films investigated by in situ reflectance interferometry Pigeat P, Easwarakhanthan T Thin Solid Films, 516(12), 3957, 2008 |