검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Surface reaction and B atom segregation in ECR chlorine plasma etching of B-doped Si1-xGex epitaxial films Cho HS, Sakuraba M, Murota J Thin Solid Films, 508(1-2), 301, 2006 |
| No. | Article |
|---|---|
| 1 |
Surface reaction and B atom segregation in ECR chlorine plasma etching of B-doped Si1-xGex epitaxial films Cho HS, Sakuraba M, Murota J Thin Solid Films, 508(1-2), 301, 2006 |