화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 99.992% Si-28 CVD-grown epilayer on 300 mm substrates for large scale integration of silicon spin qubits
Mazzocchi V, Sennikov PG, Bulanov AD, Churbanov MF, Bertrand B, Hutin L, Barnes JP, Drozdov MN, Hartmann JM, Sanquer M
Journal of Crystal Growth, 509, 1, 2019
2 MOVPE overgrowth of metallic features for realisation of 3D metal-semiconductor quantum devices
Wernersson LE, Borgstrom M, Gustafson B, Gustafsson A, Jarlskog L, Malm JO, Litwin A, Samuelson L, Seifert W
Journal of Crystal Growth, 221, 704, 2000