화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 Formation of SiC delta-doped-layer structures by CVD
Takahashi K, Uchida M, Kusumoto O, Yamashita K, Miyanaga R, Kitabatake M
Materials Science Forum, 457-460, 743, 2004
2 Delta-doped layers of SiC grown by'pulse doping' technique
Takahashi K, Yokogawa T, Uchida M, Kusumoto O, Yamashita K, Miyanaga R, Kitabatake M
Materials Science Forum, 389-3, 247, 2002
3 SiC delta-doped-layer structures and DACFET
Takahashi K, Kusumoto O, Uchida M, Yamashita K, Kitabatake M
Materials Science Forum, 433-4, 629, 2002
4 Vertical hot-wall type CVD for SiC growth
Takahashi K, Uchida M, Kitabatake M, Uenoyama T
Materials Science Forum, 338-3, 141, 2000