검색결과 : 16건
| No. | Article |
|---|---|
| 1 |
The panorama of plasma-assisted non-oxidative methane reforming Scapinello M, Delikonstantis E, Stefanidis GD Chemical Engineering and Processing, 117, 120, 2017 |
| 2 |
Studies on a supersonic thermal plasma expansion process for synthesis of titanium nitride nanoparticles Bora B, Aomoa N, Kakati M, Bhuyan H Powder Technology, 246, 413, 2013 |
| 3 |
Effect on plasma and etch-rate uniformity of controlled phase shift between rf voltages applied to powered electrodes in a triode capacitively coupled plasma reactor Sung DY, Jeong SM, Park YM, Volynets VN, Ushakov AG, Kim GH Journal of Vacuum Science & Technology A, 27(1), 13, 2009 |
| 4 |
Chemistry in long residence time fluorocarbon plasmas Sant SP, Nelson CT, Overzet LJ, Goeckner MJ Journal of Vacuum Science & Technology A, 27(2), 193, 2009 |
| 5 |
Establishment of very uniform gas-flow pattern in the process chamber for microwave-excited high-density plasma by ceramic shower plate Goto T, Inokuchi A, Ishibashi K, Yasuda S, Nakanishi T, Kohno M, Okesaku M, Sasaki M, Nozawa T, Hirayama M, Ohmi T Journal of Vacuum Science & Technology A, 27(4), 686, 2009 |
| 6 |
Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies Petrovic ZL, Raspopovic ZM, Stojanovic VD, Jovanovic JV, Malovic G, Makabe T, de Urquijo J Applied Surface Science, 253(16), 6619, 2007 |
| 7 |
Bulk periodic structures formation on monocrystalline silicon surface under the action of compression plasma flows Astashynski VM, Ananin SI, Emelyarlenko AS, Kostyukevich EA, Kuzmitzky AM, Zhvavy SP, Uglov VV Applied Surface Science, 253(4), 1866, 2006 |
| 8 |
Dc self-bias voltages in radio frequency magnetron discharges Yonemura S, Nanbu K Thin Solid Films, 506, 517, 2006 |
| 9 |
Coulomb collisions in materials processing plasmas Nanbu K, Furubayashi T, Takekida H Thin Solid Films, 506, 720, 2006 |
| 10 |
Coupling of plasma and flow in materials processing Shiozawa M, Nanbu K Thin Solid Films, 457(1), 48, 2004 |