검색결과 : 1건
No. | Article |
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1 |
Structural study of nanoporous ultra low-k dielectrics using complementary techniques: Ellipsometric porosimetry, X-ray reflectivity and grazing incidence small-angle X-ray scattering Jousseaume V, Rolland G, Babonneau D, Simon JP Applied Surface Science, 254(2), 473, 2007 |