검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Novel organosiloxane vapor annealing process for improving properties of porous low-k films Kohmura K, Tanaka H, Oike S, Murakami M, Fujii N, Takada S, Ono T, Seino Y, Kikkawa T Thin Solid Films, 515(12), 5019, 2007 |
| 2 |
Positron annihilation in SiO2-Si studied by a pulsed slow positron beam Suzuki R, Ohdaira T, Uedono A, Kobayashi Y Applied Surface Science, 194(1-4), 89, 2002 |